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Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope
Robust Six Degree-Of-Freedom Micromachined Gyroscope With Anti-Phase Drive Scheme
Micromachined Gyroscopes with Two Degrees of Freedom Sense-Mode Oscillator
Fully Balanced Micro-Machined Inertial Sensor
Tru-Wafer Interconnects For Mems Double-Sided Fabrication Process
3-D Folded MEMS Technology For Multi-Axis Sensor Systems
Three-Dimensional Wafer-Scale Batch-Micromachined Angle/Angular Rate Microshell Resonator Gyroscope
Micromachined Gyroscope Design Allowing for Both Robust Wide-Bandwidth and Precision Mode-Matched Operation
Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwidth and Gain
Wafer-Level Micro-Glass Blowing
Broadband Distributed-Mass Micromachined Gyroscope
Wafer Scale Glass Blowing
Single-Mask Fabrication Process for Linear and Angular Piezoresistive Accelerometers
Post-Release Capacitance Enhancement in Micromachined Devices
Compact Atomic Magnetometer and Gyroscope
A Low-Cost-Wafer-Level Process For Packaging MEMS 3-D Devices
Methods of Self-Calibration for Coriolis Vibratory Gyroscopes